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Modeling Aspects in Optical Metrology Conference

21 - 24 Jun 2021Add To Calendar
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This conference will focus on essentially any optical metrology, where modelling aspects play a crucial role and accurate modelling is a prerequisite for traceable and comparable measurements. One important topic is the development and verification of methods to describe the interaction of light with matter for quantitative characterization of micro- and nanostructures. The verification of these methods often relies on comparison measurements with independent metrology methods. Improved data .. continue reading analysis is often achieved applying sophisticated hybrid metrology and holistic approaches. Relevant applications include e.g. optical metrology and inspection of nanostructures for semiconductor and nanotechnologies, display production to the investigation of grating structures and grating-based devices. In most of the applications nanometer or sub-nanometer measurement uncertainties are required. Thus, complex and increasingly challenging metrology applications emphasize even more the importance of error modelling for optical systems. Special emphasis shall be placed on the description and modelling of new methods, algorithms, components or complete measurement systems up to the treatment of big data.


09:00 AM-06:00 PM (expected)
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Electric & Electronics


Jun 2021 Interested

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Spie- International Society For Optical EngineeringRenowned

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Messe Munchen GmbH Messegelande 81823 Munchen
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