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12 Mar 2021 • 

Multiphysics Simulation of MEMS Actuators

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Mar 2021

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Micro-electromechanical systems (MEMS) involve many fields of physics, including: electromagnetics, structures, heat transfer, fluids, etc. MEMS .. Read more devices are classified into actuators, sensors, and microfluidics based on their functions. This seminar will introduce common MEMS actuators, including different types, engineering applications, their working principles, and so on. We will focus on how to use COMSOL Multiphysics® to model and simulate the coupling of electricity, heat, force, and flow in MEMS actuators. Through simulation, we will understand its working principle, predict performance, and optimize design. We can also couple the finite element simulation model with the control circuit to realize field-circuit coupling modeling. With the help of multiphysics simulation analysis, we can optimize its design and obtain reliable MEMS actuators. In this webinar, we will demonstrate the main points and precautions of this type of modeling through demonstration operations.

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